Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
نویسندگان
چکیده
CORRECTION In the original publication [1] Fig. 3 was presented incorrect. The correct additional file has been included with this erratum and the original article has been updated to rectify this error.
منابع مشابه
Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
A novel device for monitoring plasma-induced damage in the back-end-of-line (BEOL) process with charge splitting capability is first-time proposed and demonstrated. This novel charge splitting in situ recorder (CSIR) can independently trace the amount and polarity of plasma charging effects during the manufacturing process of advanced fin field-effect transistor (FinFET) circuits. Not only does...
متن کاملA Smart Charging Method for Optimum Electric Vehicles Integration in the Distribution System in Presence of Demand Response Program
Electric vehicle charging in the distribution network is one of the common techniques for technical and economic management of energy distribution, which, if implemented properly, will bring several benefits such as reducing network peak load, charging costs reduction, loss minimization, and etc. In most traditional charging methods, the constraints of fully charging electric vehicles at depart...
متن کاملCompressive and rarefactive dust-ion acoustic solitary waves in four components quantum plasma with dust-charge variation
Based on quantum hydrodynamics theory (QHD), the propagation of nonlinear quantum dust-ion acoustic (QDIA) solitary waves in a collision-less, unmagnetized four component quantum plasma consisting of electrons, positrons, ions and stationary negatively charged dust grains with dust charge variation is investigated using reductive perturbation method. The charging current to the dust grains ca...
متن کاملScheduling and Stochastic Capacity Estimation of an EV Charging Station with PV Rooftop Using Queuing Theory and Random Forest
Power capacity of EV charging stations could be increased by installing PV arrays on their rooftops. In these charging stations, power transmission can be two-sided when needed. In this paper a new method based on queuing theory and random forest algorithm proposed to calculate net power of charging station considering random SOC of EV’s. Due to estimation time constraints, a queuing model with...
متن کاملIn situ ion substitution of sodium gluconate: Comparison of bipolar membrane electrodialysis and electro-membrane reactor for producing gluconic acid
Based on the home-made cation-exchange membrane (CEM) and bipolar membrane (BPM), electrodialysis with bipolar membrane (EDBPM) and electro-membrane reactor with three compartments (EMR-3) were developed to achieve in situ ion substitution and recovery of gluconic acid (GLH) from its sodium salt. Physicochemical and electrochemical properties of CEM and BPM were studied to assess their...
متن کامل